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Semiconductor Manufacturing Technology

Semiconductor Manufacturing Technology
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  • Buy New: $1,090.01
  • as of 4/20/2018 18:09 UTC details
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New (4) Used (28) from $79.99
  • Seller:RushLtd
  • Sales Rank:148,943
  • Format:Color
  • Languages:English (Published), English (Original Language), English (Unknown)
  • Media:Paperback
  • Number Of Items:1
  • Edition:1
  • Pages:666
  • Shipping Weight (lbs):3.29
  • Dimensions (in):8.2 x 1.6 x 10.8
  • Publication Date:November 19, 2000
  • MPN:Illustrations
  • ISBN:0130815209
  • EAN:9780130815200
  • ASIN:0130815209
Availability:Usually ships in 6-10 business days

Editorial Reviews:

In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.

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